A comparative study of single and double Langmuir probe techniques for RF plasma characterization

Contributions to Plasma Physics

Volumn 39, Issue 3, 1999, Pages 235-246

  Castro, R M ^a   Cirino, G A ^a   Verdonck, P ^a   Maciel, H S ^b   Massi, M ^a   Pisani, M B ^a   Mansano, R D ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b Departamento de Física   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODES; ELECTROMAGNETIC INDUCTION; ELECTRON TEMPERATURE; INDUCTIVELY COUPLED PLASMA; PLASMA DENSITY; WAVE PLASMA INTERACTIONS;

COMPARATIVE ANALYZES; COMPARATIVES STUDIES; DOUBLE PROBE; PLASMA CHARACTERIZATION; PLASMA CONDITIONS; PROBE TECHNIQUE; RADIO FREQUENCY CHOKES; RADIO FREQUENCY PLASMA; SIMPLE++; SINGLE PROBE;

LANGMUIR PROBES;

EID: 0033434416     PISSN: 08631042     EISSN: None     Source Type: Journal    
DOI: 10.1002/ctpp.2150390305     Document Type: Article

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