A novel trench capacitor enhancement approach by selective liquid-phase deposition

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 4, 2005, Pages 644-647

  Lin, Shian Jyh ^a,b   Lai, Chao Sung ^a   Liao, Shian Hau ^b   Lee, Chung Yuan ^b,d   Lee, Pei Ing ^b,e   Chiang, Shi Ming ^c   Liang, Muh Wang ^c  

^a CHANG GUNG UNIVERSITY   (Taiwan)

^b NANYA TECHNOLOGY CORPORATION   (Taiwan)

^c INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^d Process Development Division

^e Technology Development Division   (Taiwan)

Author keywords

Capacitance enhancement factor; Selective liquid phase deposition (S LPD); Trench bottle

Indexed keywords

CAPACITANCE ENHANCEMENT FACTOR; SELECTIVE LIQUID PHASE DEPOSITION (S-LPD); TRENCH BOTTLES;

CAPACITANCE; CAPACITORS; TRENCHING;

DYNAMIC RANDOM ACCESS STORAGE;

EID: 28644439794     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2005.858527     Document Type: Conference Paper

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