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Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 242, Issue 1-2, 2006, Pages 88-92

Indentation method to measure the residual stress induced by ion implantation

(5) Wang, Q a Ozaki, K a Ishikawa, H b Nakano, S a Ogiso, H a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b UNIVERSITY OF ELECTRO COMMUNICATIONS (Japan)

Author keywords

Indentation; Ion implantation; Residual stress

Indexed keywords

COMPUTER SIMULATION; ELASTICITY; FINITE ELEMENT METHOD; INDENTATION; IRON; PLATES (STRUCTURAL COMPONENTS); POSITIVE IONS; RESIDUAL STRESSES; STAINLESS STEEL;

DEPTH-SENSING INDENTATION SYSTEM; INDENTATION METHOD; MICROMECHANICAL ANALYSIS; STAINLESS STEEL PLATES;

ION IMPLANTATION;

EID: 28544436352 PISSN: 0168583X EISSN: None Source Type: Journal
DOI: 10.1016/j.nimb.2005.08.008 Document Type: Conference Paper

Times cited : (89)

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