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Optics Communications

Volumn 257, Issue 2, 2006, Pages 217-224

Measurement of surface profile in vibrating environment with instantaneous phase shifting interferometry

(3) Sivakumar, N R a Tan, B b Venkatakrishnan, K c

a Dept of Electrical and Computer Engineering (Canada)

b RYERSON UNIVERSITY (Canada)

c Xsil Ltd (Ireland)

Author keywords

Instantaneous phase shifting; Modified Michelson interferometer; Surface profile measurement; Vibrating environment

Indexed keywords

MIRRORS; PHASE SHIFT; PRECISION ENGINEERING; VIBRATION MEASUREMENT;

INSTANTANEOUS PHASE SHIFTING; MODIFIED MICHELSON INTERFEROMETERS; SURFACE PROFILE MEASUREMENTS; VIBRATING ENVIRONMENT;

INTERFEROMETRY;

EID: 28444433099 PISSN: 00304018 EISSN: None Source Type: Journal
DOI: 10.1016/j.optcom.2005.07.056 Document Type: Article

Times cited : (10)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.