A novel technique for micro profiling of slots

Lasers in Engineering

Volumn 12, Issue 1, 2002, Pages 43-52

  Sivakumar, N R ^a   Venkatakrishnan, K ^a   Ngoi, B K A ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Instantaneous phase shifting; Slot measurement; Surface Profiling

Indexed keywords

INTERFEROMETRY; LIGHT POLARIZATION; PHASE SHIFT; SURFACE TREATMENT;

INSTANTANEOUS PHASE SHIFTING; SLOT MEASUREMENT; SURFACE PROFILING;

MICROMACHINING;

EID: 0012756480     PISSN: 08981507     EISSN: None     Source Type: Journal    
DOI: 10.1080/08981500290022761     Document Type: Article

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