Some considerations of reduction of reference phase error in phase-stepping interferometry

Applied Optics

Volumn 38, Issue 4, 1999, Pages 655-659

  Schwider, Johannes ^a   Dresel, Thomas ^a   Manzke, Bernd ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000002507     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.38.000655     Document Type: Article

References (23)

1. H. J. Bruning, D. R. Herriot, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wavefront measur-ing interferometer for testing optical surfaces and lenses,” Appl. Opt. 13, 2693-2703 (1974).
2. J. Schwider, B. Burow, K. E. Elsner, J. Grzanna, R. Spolaczyk, and K. Merkel, “Digital wavefront measuring interferometry: some systematic error sources,” Appl. Opt. 22, 3421-3432 (1983).
3. K. Kinnstatter, A. W. Lohmann, J. Schwider, and N. Streibl, “Accuracy of phase shifting interferometry,” Appl. Opt. 27, 5082-5089 (1988).
4. D. Malacara, Optical Shop Testing, Wiley Series in Pure and Applied Physics (Wiley, New York, 1990).
5. P. Hariharan, B. F. Oreb, and T. Eiju, “Digital phase-shifting interferometry: a simple error-compensating phase calcula- tion algorithm,” Appl. Opt. 26, 2504-2506 (1987).
6. K. Creath, “Phase-measurement interferometry techniques,” Prog. Opt. 26, 349-393 (1988).
7. J. Schwider, “Advanced evaluation techniques in interferome-try,” Prog. Opt. 28, 271-359 (1990).
8. M. F. Kuechel, “Some progress in phase measurement tech-niques,” in Fringe 97, Proceedings of the Third International Workshop on Automatic Processing of Fringe Patterns, Bremen, Akademie-Verlag Series in Optical Metrology, W. Jueptner and W. Osten, eds. (Akademie Verlag, Berlin, 1997), pp. 27-44.
9. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, “Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts,” J. Opt. Soc. Am. A 14, 918-930 (1997).
10. Y. Surrel, “Design of algorithms for phase measurements by the use of phase stepping,” Appl. Opt. 35, 51-60 (1996).
11. J. Schmit and K. Creath, “Extended averaging technique for derivation of error-compensating algorithms in phase shifting interferometry,” Appl. Opt. 34, 3610-3619 (1995).
12. K. Hibino, “Susceptibility of systematic error-compensating algorithms to random noise in phase-shifting interferometry,” Appl. Opt. 36, 2084-2093 (1997).
13. C. Rathjen, “Statistical properties of phase-shift algorithms,” J. Opt. Soc. Am. A 12, 1997-2008 (1997).
14. K. Freischlad and Ch. L. Koliopoulos, “Fourier description of digital measuring interferometry,” J. Opt. Soc. Am. 7, 542-551 (1990).
15. Y. Surrel, “Phase stepping: a new self-calibrating algorithm,” Appl. Opt. 32, 3598-3600 (1993).
16. K. G. Larkin and B. F. Oreb, “Design and assessment of sym-metrical phase-shifting algorithms,” J. Opt. Soc. Am. 9, 481-489 (1992).
17. D. Malacara and D. Malacara-Doblado, “Error analysis of phase detection algorithms,” in Fringe 97, Proceedings of the Third International Workshop on Automatic Processing of Fringe Patterns, Bremen, Akademie-Verlag Series in Optical Metrology, W. Jueptner and W. Osten, eds. (Akademie Verlag, Berlin, 1997), pp. 45-51.
18. J. Schwider, “Phase shifting interferometry: reference phase error reduction,” Appl. Opt. 28, 3889-3892 (1989).
19. W. W. Macy, “Two-dimensional fringe-pattern analysis,” Appl. Opt. 22, 3898-3901 (1992).
20. D. W. Robinson, Interferogram Analysis (Institute of Physics, Bristol, UK, 1990).
21. J. Schwider and O. Falkenstorfer, “Twyman-Green interferometer for testing microspheres,” Opt. Eng. 34, 2972-2975 (1995).
22. S. Haselbeck, H. Schreiber, J. Schwider, and N. Streibl, “Mi-crolenses fabricated by melting photoresist,” Opt. Eng. 6, 1322-1324 (1993).
23. M. Eisner and J. Schwider, “Transferring resist microlenses into silicon by reactive ion etching,” Opt. Eng. 35, 2979-2982 (1996).