Simulation, fabrication and testing of aluminium nitride piezoelectric microbridges

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5836, Issue , 2005, Pages 16-26

  Olivares, J ^a   Clement, M ^a   Iborra, E ^a   Vergara, L ^a   Sanchez Rojas J L ^b   Vazquez J ^b   Sanz, P ^b  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

Author keywords

Aluminum nitride; Microbridge; Piezoelectric actuation; Simulation

Indexed keywords

ACTUATORS; ALUMINUM NITRIDE; COMPUTER SIMULATION; FINITE ELEMENT METHOD; PIEZOELECTRIC DEVICES; SUBSTRATES;

DEVICE OPERATION; MICROBRIDGE; PIEZOELECTRIC ACTUATION; SILICON TECHNOLOGIES;

MICROELECTROMECHANICAL DEVICES;

EID: 28344440407     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608228     Document Type: Conference Paper

References (22)

1. S. J. Gross, S. Tadigadapa, T. N. Jackson, S. Trolier-McKinstry, Q. Q. Zhang, Lead-zirconate-titanate-based piezoelectric micromachined switch, Appl. Phys. Lett. 83(1) (2003) pp. 174-176.
2. P.B. Kirby, M.D.G. Potter, C.P. Williams, M.Y. Lim, Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators J. Eur. Cer. Soc. 23 (2003) pp. 2689-2692.
3. E. Iborra, J. Olivares, M. Clement, L. Vergara, A. Sanz-Hervás, J. Sangrador, Piezoelectric properties and residual stress of sputtered AlN thin films for MEMS applications, Sensors and Actuators A 115 (2004) pp. 501-507.
4. F. Xu, R. A. Wolf, T. Yoshimura, S. Trolier-McKinstry, Piezoelectric Films for MEMS applications, Microwave Symposium Digest, 2004 IEEE MTT-S International (2004) Volume: 2, pp. 585-588
5. E. Thielicke, E. Obermeier, Microactuators and their technologies, Mechatronics 10 (2000) pp. 431-455.
6. R. Aigner, RF-MEMS Filters Manufactured on Silicon: Key Facts about Bulk-Acoustic-WaveTechnology, proceeding of the 2003 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, (2003) pp. 157-161.
7. J. Bjurström, D. Rosen, I. Katardjiev, V.M. Yanchev, I. Petrov, Dependence of the Electromechanical Coupling on the Degree of Orientation ofc-Textured Thin AlN Films, IEEE Trans. Ultrason. Ferroelect. Freq. Contr., 51 (10) (2004) pp. 1347-1352.
8. D.L. DeVoe, Piezoelectric thin film micromechanical beam resonators, Sensors and Actuators A 88 (2001) pp. 263-272.
9. Hee Chul Lee, Jae Yeong Park, Kyeong Hak Lee, Hyo Jin Nam, Jong Uk Bu, Silicon bulk micromachined RF MEMS switches with 3.5 volts operation by using piezoelectric actuators, Microwave Symposium Digest, 2004 IEEE MTT-S International (2004) Volume: 2, pp. 585-588.
10. C. Zinck, E. Defay, M. Aid, A. De Grave, A piezoelectric actuated SiN clamp-clamp beam for micro switch application, Proceedings of the Thin Film and NanoTech 2004 (in press).
11. J. Olivares, E. Iborra, M. Clement, L. Vergara, J. Sangrador, A. Sanz-Hervas, AlN based piezoelectrically-actuated microbridges for RF-MEMS switching, Proceedings of the Technical Digest of Eurosensors XVIII, (2004) pp. 759-762.
12. S. D. Senturia, Microsystem Design. Boston: Kluwer Academic Pub., (2001).
13. X. Chauffleur, L. Rabbia, P. Pons, K. Grenier, R. Plana, L. Dantas, F. Flourens, J. Kuchenbecker, D. Dubuc, A. Boukabache, Effect of membrane shape on mechanical behavior of RF switches, Sensors and Actuators A 112 (2004) pp. 148-154.
14. S. Pamidighantam, R. Puers, K. Baert, H.A.C. Tilmans, Pull-in voltage analysis of electrostatically actuated beam structures with fixed-fixed and fixed-free end conditions J. Micromech. Microeng. 12 (2002) 458-464.
15. J. Friend, A. Umeshima, T. Ishii, K. Nakamura, S. Ueha, A piezoelectric linear actuator formed from a multitude of bimorphs, Sensors and Actuators A 109 (2004) pp. 242-251.
16. C. Zinck, D. Pinceau, E. Defaÿ, E. Delevoye, D. Barbier, Development and characterization of membranes actuated by a PZT thin film for MEMS applications, Sensors and Actuators A 115 (2004) pp. 483-489.
17. A.T. Ferguson, L. Li, V.T. Nagaraj, B. Balachandran, B. Piekarski, D.L. DeVoe, Modeling and design of composite free-free beam piezoelectric resonators, Sensors and Actuators A 118 (2005) pp. 63-69.
18. J. Olivares, E. Iborra, M. Clement, L. Vergara, J. Sangrador, A. Sanz-Hervas, Piezoelectric actuation of microbridges using AlN, Sensors and Actuators (in press).
19. Coventor Inc., CoventorWare™ Reference Guide, Cary, NC, 2002. www.coventor.com
20. K. Tsubouchi, N. Mikoshiba, Zero-temperature-coefficient SAW devices on AlN epitaxial films, IEEE trans. on Sonics and Ultrasonics SU-32 (1985) pp. 634-644.
21. 3 thin films Sensors and Actuators 77 (1000) pp. 106-112.
22. www.matweb.com, searchable database of material properties. (2005)