Effect of membrane shape on mechanical behavior of RF switches

Sensors and Actuators, A: Physical

Volumn 112, Issue 1, 2004, Pages 148-154

  Chauffleur, X ^b   Rabbia, L ^a   Pons, P ^a   Grenier, K ^a   Plana, R ^a   Dantas, L ^b   Flourens, F ^a   Kuchenbecker, J ^a   Dubuc, D ^a   Boukabache, A ^a  

^a LAAS CNRS   (France)

^b EPSILON Ingénierie ^*  (France)

Author keywords

Mechanical behavior; Modeling; New materials and their characterization; RF switches

Indexed keywords

ANCHORAGES (CONCRETE CONSTRUCTION); COMPUTER SIMULATION; ELASTIC MODULI; FINITE ELEMENT METHOD; POISSON RATIO; POLYSILICON; STIFFNESS; STRESS RELAXATION; TOPOLOGY;

MECHANICAL BEHAVIOUR; MEMBRANE SHAPE; RF SWITCHES; WAVY BRIDGE;

SWITCHES;

EID: 11144356708     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.033     Document Type: Article

References (12)

1. Petersen K.E. Micromechanical membrane switches on silicon. IBM J. Res. Develop. 23(4):1979;376-385.
2. C. Goldsmith et al., Micromachined Membrane Switches for Microwave Applications, IEEE MTT-S, 1995, pp. 91-94.
3. H. De Los Santos et al., Microwave and Mechanical Considerations in the Design of MEM Switches for Aerospace Application, IEEE MTT-S, 1997, pp. 235-253.
4. Barker N., et al. Distributed MEMS true-time delay phase shifter and wide-band switches. IEEE Trans. Microwave Theory Tech. 46(11):1998;1881-1889.
5. Yao Z. Micromechanical low-loss microwave switches. IEEE J. Microelectromech. Syst. 8(2):1999;129-134.
6. Muldavin J., et al. High-isolation CPW MEMS shunt switches. Part I. Modeling. Part II. Design. IEEE Trans. Microwave Theory Tech. 48(6):2000;1045-1056.
7. Hah D., et al. A low voltage actuated micromachined microwave switch using torsion springs and leverage. IEEE Trans. Microwave Theory Tech. 48(12):2000;2540-2545.
8. Chang C., et al. Innovative micromachined switch with very low insertion loss. Sens. Actuators. 79:2000;71-75.
9. M. Rebeiz et al., RF MEMS Switches and Switch Circuits, IEEE Microwave Magazine, December 2001, pp. 59-71.
10. Huang J., et al. Mechanical design and optimization of capacitive micromachined switch. Sens. Actuators. A93:2001;273-285.
11. K. Grenier et al., Bulk silicon micro-machined MEMS switches for millimeter-wave applications, in: Proceedings of the European Microwave Conference, London, 24-28th September 2001.
12. Huang J.M., et al. Mechanical design and optimization of capacitive micromachined switch. Sens. Actuators. A93:2001;273-285.