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Volumn 555, Issue 1-2, 2005, Pages 411-419

Investigation of voltages and electric fields in silicon radiation detectors using a scanning electron microscope

Author keywords

Electric field; Radiation detector; Scanning electron microscope; Silicon; Voltage; Voltage contrast

Indexed keywords

CAPACITANCE; ELECTRIC FIELD EFFECTS; ELECTRIC POTENTIAL; MATHEMATICAL MODELS; SCANNING ELECTRON MICROSCOPY; SILICON;

EID: 28044456509     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2005.07.075     Document Type: Article
Times cited : (3)

References (18)
  • 9
    • 0019585411 scopus 로고
    • Scanning electron beam probes VLSI chips
    • July 14
    • P. Fazekas, H.-P. Feuerbaum, E. Wolfgang, Scanning electron beam probes VLSI chips, Electronics, July 14, 1981, pp. 106-112.
    • (1981) Electronics , pp. 106-112
    • Fazekas, P.1    Feuerbaum, H.-P.2    Wolfgang, E.3
  • 13
    • 26944456715 scopus 로고    scopus 로고
    • CERN/LHCC-2003-058
    • RD50 Status Report, CERN/LHCC-2003-058, 2003,p. 30.
    • (2003) RD50 Status Report , pp. 30
  • 16
    • 28044444177 scopus 로고    scopus 로고
    • Silvaco International, http://www.silvaco.com.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.