Using an in-line defect-analysis tool to provide real-time root-cause knowledge of yield loss

MICRO

Volumn 22, Issue 5, 2004, Pages 77-86

  Blanc Coquand, Stéphanie ^a,c   Hinschberger, Benoit ^a,c   Rouchouze, Eric ^a,c   Sicurani, Emmanuel ^b   Teshima, Janet ^a,d   Castagna, Marc ^a   Weschler, Matt ^a   Dworkin, Larry ^a   Renard, Didier ^a  

^a STMiroelectronic ^*

^b DIF   (France)

^c STMICROELECTRONICS   (France)

^d Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATIC DEFECT CROSS-SECTIONING (ADX); AUTOMATIC DEFECT REDETECTION (ADR); FOCUSED ION BEAMS (FIB); OPTICAL INSPECTION;

ALUMINUM; AUTOMATION; ELECTRON BEAMS; FAILURE ANALYSIS; IMAGE ANALYSIS; IMAGING SYSTEMS; ION BEAMS; OPTICAL RESOLVING POWER; PROCESS CONTROL; REAL TIME SYSTEMS; RESEARCH AND DEVELOPMENT MANAGEMENT; SCANNING ELECTRON MICROSCOPY;

PRODUCTION ENGINEERING;

EID: 3042772961     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Review

References (0)