Use of plasma polymerisation process for fabrication of bio-MEMS for micro-fluidic devices

Applied Surface Science

Volumn 252, Issue 5, 2005, Pages 1710-1715

  Dhayal, Marshal ^a   Jeong, Hyung Gon ^a   Choi, Jeong Sik ^a  

^a Dongshin University   (South Korea)

Author keywords

Acrylic acid; Bio MEMS; Bonding; Micro fluidics; Plasma polymerisation

Indexed keywords

GLASS; LITHOGRAPHY; PLASMA POLYMERIZATION; SILICON; SURFACE TREATMENT;

BIO-MEMS; MICRO DEVICES; ORGANIC MICRO-FLUIDIC DEVICE (OMDF);

MICROELECTROMECHANICAL DEVICES;

EID: 27944479022     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.03.198     Document Type: Article

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