Electron temperature control in low-pressure plasmas using a two-mesh-separation technique

Vacuum

Volumn 70, Issue 1, 2003, Pages 67-71

  Dhayal, M ^a   Forder, D ^a   Short, R D ^b   Bradley, J W ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Electron temperature control; Ion energy control; Langmuir probe; Low pressure plasma processing; Mesh separation

Indexed keywords

DIFFUSION; ELECTRONS; ION BOMBARDMENT; POLYMERS;

LOW-PRESSURE PLASMAS;

PLASMAS;

EID: 0037458778     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00769-8     Document Type: Article

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