Tailored plasmas for applications in the surface treatment of materials

Surface and Coatings Technology

Volumn 162, Issue 2-3, 2003, Pages 294-300

  Dhayal, M ^a   Forder, D ^a   Parry, K ^b   Short, R D ^b   Barton, D ^b   Bradley, J W ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

^b UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

Bombarding ion flux; Ion energy control; Plasma discharge; Surface treatment

Indexed keywords

ION BOMBARDMENT; PLASMA PROBES; PLASMAS; SUBSTRATES;

PRIMARY DISCHARGE POWER;

SURFACE TREATMENT;

SURFACE TREATMENT;

EID: 0037454526     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00701-6     Document Type: Article

References (18)