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Volumn 100, Issue 7, 2000, Pages 2679-2692

From batch to continuous manufacturing of microbiomedical devices

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; BIOSENSORS; CHEMICAL SENSORS; CONTROLLED DRUG DELIVERY; MICROMACHINING; MICROPROCESSOR CHIPS; MINIATURE INSTRUMENTS; ORGANIC POLYMERS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034228461     PISSN: 00092665     EISSN: None     Source Type: Journal    
DOI: 10.1021/cr980098o     Document Type: Article
Times cited : (40)

References (47)
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    • The market numbers for MEMS devices varies widely from market study to market study often because these studies do not specify exactly what is included (e.g., system, subsystem, component, etc.) or even what a MEMS device is (e.g., an LED, Hall chip, etc.). Numbers that are frequently quoted are that the MEMS industry will be 10 billion by 2000 (it was 2 billion in 1996), see, for example: Micromachining Devices 1996, 1, 1.
    • (1996) Micromachining Devices , vol.1 , pp. 1
  • 4
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    • Dr. Personal Comunication
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    • (1992)
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    • note
    • A highly polished Si surface is smooth and specular (values between 5 and 10 μm are typical surface flatness requirements), and a thin layer of Al on such a surface forms an excellent mirror.
  • 8
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    • U.S. Patent 4,764,864, Aug 23, 1988
    • Madou, M. J. U.S. Patent 4,764,864, Aug 23, 1988.
    • Madou, M.J.1
  • 9
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    • U.S. Patent 4,874,500, Oct 17, 1989
    • Madou, M. J. U.S. Patent 4,874,500, Oct 17, 1989.
    • Madou, M.J.1
  • 14
    • 0342343807 scopus 로고
    • Microsysteem technologie: Een niet te missen ontwikkeling
    • in Dutch
    • Lebbink, G. K. Microsysteem Technologie: Een niet te Missen Ontwikkeling. Mikroniek 1994, 3, 70 (in Dutch).
    • (1994) Mikroniek , vol.3 , pp. 70
    • Lebbink, G.K.1
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    • Baltes, H., Gopel, W., Hesse, J, Eds.; VCH Weinheim: New York
    • Becker, H.; Manz, A. In Sensors Update; Baltes, H., Gopel, W., Hesse, J, Eds.; VCH Weinheim: New York, 1998; Vol. 3, p 208.
    • (1998) Sensors Update , vol.3 , pp. 208
    • Becker, H.1    Manz, A.2
  • 28
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.