Stucture character of fast growth polycrystalline silicon film from SiCl4/H2

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2005, Pages 1512-1515

  Huang, Rui ^a   Lin, Xuanying ^a   Yu, Yunpeng ^a   Lin, Kuixun ^a   Wei, Junhong ^a   Lin, Shunhui ^a   Yu, Chuying ^a  

^a SHANTOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; CRYSTALLIZATION; GRAIN SIZE AND SHAPE; HYDROGEN; LOW TEMPERATURE EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTION KINETICS; THIN FILMS;

HYDROGEN DILUTION; RF POWER; TETRACHLORINE SILICON;

POLYSILICON;

EID: 27944458906     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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