Arrayed micro needles for mechanical gene insertion

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4937, Issue , 2002, Pages 90-97

  Cabodevila, Gonzalo ^a   Lepioufle, Bruno ^b   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Gene insertion; Micro needle; RIE etching; XeF2

Indexed keywords

DRY ETCHING; MICROELECTROMECHANICAL DEVICES; NEEDLES; PHOTORESISTS; SILICON COMPOUNDS;

MECHANICAL GENE INSERTION;

GENETIC ENGINEERING;

EID: 0037965678     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473962     Document Type: Conference Paper

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