Structural quality of smooth AIC poly-Si films on glass substrates

Conference Record of the IEEE Photovoltaic Specialists Conference

Volumn , Issue , 2005, Pages 1031-1034

  Widenborg, Per I ^a   Puzzer, Tom ^a   Stradal, Jirka ^b   Neuhaus, Dirk Holger ^c   Inns, Daniel ^a   Straub, Axel ^a   Aberle, Armin G ^a  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b UTRECHT UNIVERSITY   (Netherlands)

^c Deutsche Cell GmbH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; GLASS; POLYSILICON; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION;

ALUMINIUM OXIDE; DENDRITIC GROWTH; SI PRECIPITATES;

THIN FILMS;

EID: 27944451929     PISSN: 01608371     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (17)

1. K.R. Catchpole, M.J. McCann, K.J. Weber, A.W. Blakers, "A review of thin-film crystalline silicon for solar cell applications Part 2: Foreign substrates", Solar Energy Materials Solar Cells 68, 2001, p.173.
2. J.P. Lu, K. Van Schuylenbergh, J. Ho, Y. Wang, J.B. Boyce, R.A. Street, "Flat panel imagers with pixel level amplifiers based on polycrystalline silicon thin-film transistor technology", Appl. Phys. Lett. 80, 2002, p. 4656.
3. A.G. Aberle, P.I. Widenborg, A. Straub, and N.-P. Harder, "Polycrystalline silicon on glass thin-film solar cell research at UNSW using the seed layer concept", Proc. 3rd World Conference on Photovoltaic Energy Conversion, Osaka, pp. 1194-1197.
4. O. Nast and S.R. Wenham, "Elucidation of the layer exchange mechanism in the formation of poly-crystalline silicon by aluminium-induced crystallisation", J. Appl. Phys. 88, 2000, pp. 124-132.
5. P.I. Widenborg and A.G. Aberle, "Surface morphology of poly-Si films made by aluminium-induced crystallisation on glass substrates", J. Crystal Growth 242, 2002, pp. 270-282.
6. E. Pihan, A. Slaoui, P. Roca I Cabarrocas, and A. Focsa, "Polycrystalline silicon films by aluminium-induced crystallisation: growth process vs. silicon deposition method", Thin Solid Films 451-452, 2004, pp. 328-333.
7. N. Chuangsuwanich, P.I. Widenborg, P. Campbell, and A.G. Aberle, "Light trapping properties of thin silicon films on AIT-textured glass", Tech. Digest 14th International Photovoltaic Science and Engineering Conference, Bangkok, 2004, pp. 325-326.
8. B. Rau, J. Schneider, M. Muske, I. Sieber, S. Gall, M. Stöger-Pollach, P. Schattschneider, and W. Fuhs, "Epitaxial Si growth on polycrystalline Si seed layers at low temperature", Proc. 19th European Photo-voltaic Solar Energy Conference, Paris, June 2004, pp. 1131-1134.
9. G. Harbeke and L. Jastrzebski, "Assessment of surface quality of SIMOX wafers by UV reflectance", J. Electrochemical Society 137, 1990, pp. 696-699.
10. A. Straub, P.I. Widenborg, A.B. Sproul, Y. Huang, N.-P Harder, and A.G. Aberle, "Fast and non-destructive assessment of epitaxial quality of polycrystalline silicon films on glass by optical measurements", J. Crystal Growth 265, 2004, pp. 168-173.
11. M.A. Green and M.J. Keevers, "Optical properties of intrinsic silicon at 300 K", Progress in Photovoltaic 3, 1995, pp. 189-192.
12. A. Straub, D. Inns, O. Kuntz, M.L Terry, P.I. Widenborg, A.B. Sproul, and A.G. Aberle, "Towards 400 mV ALICIA thin-film silicon solar cells on glass", this conference.
13. J. Stradal, G. Scholma, H. Li, C.H.M. van der Werf, J.K. Rath, P.I. Widenborg, P. Campbell, A.G. Aberle, R.E.I. Schropp, "Epitaxial thickening of AIC polycrystalline silicon seed layers on glass by Hot Wire CVD", Proc. 3rd International Conference on HWCVD (Cat-CVD) Processes, Utrecht, The Netherlands, 2004, in press.
14. P.I. Widenborg, A. Straub, and A.G. Aberle, "Epitaxial thickening of AIC poly-Si seed layers on glass by solid phase epitaxy, Journal of Crystal Growth (in press).
15. P.I. Widenborg, J. Weber, M.L. Terry, and A.G. Aberle, "Solid phase epitaxy of PECVD a-Si:H on AIC poly-Si seed layers", Abstract submitted to the 20th European Photovoltaic Solar Energy Conference, Barcelona, June 2005.
16. C.L. Fan, M.C. Chen, Y. Chang, "A novel two-step annealing technique for fabrication of high performance low temperature poly-Si TFTs, J. Electrochemical Soc. 150, 2003, p. H178.
17. G. Andrä, J. Bergmann, F. Falk and E. Ose, "Multi-crystalline silicon thin film solar cells on glass", Proc. 19th European Photovoltaic Solar Energy Conference, Paris, June 2004, pp. 872-875.