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Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 123-127

Effect of the target power density on the synthesis and physical properties of sputtered nc-C films

(7) Myung, Hyun S a Park, Yong S a Hong, B a Han, Jeon G a Kim, Young H b Lee, Jeong Y b Shaginyan, Leonid R c

a Sungkyunkwan University (South Korea)

b Korea Advanced Institute of Science and Technology (KAIST) (South Korea)

c FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE (Ukraine)

Author keywords

CFUBM; Nanostructured carbon; nc C; sp2 bonding

Indexed keywords

CARBON; ELECTRIC CONDUCTIVITY; INDENTATION; MAGNETRON SPUTTERING; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY;

CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING SYSTEM (CFUBM); NANOSTRUCTURED CARBON; NC-C; SP2 BONDING;

THIN FILMS;

EID: 27944447311 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.07.170 Document Type: Conference Paper

Times cited : (14)

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