Electrical properties of ion beam mixed Ti suicide at metal/Si interface

Journal of the Indian Institute of Science

Volumn 85, Issue 3, 2005, Pages 151-156

  Sisodia, Veenu ^a   Kabiraj, D ^b   Jain, I P ^a  

^a UNIVERSITY OF RAJASTHAN   (India)

^b INTER UNIVERSITY ACCELERATOR CENTRE   (India)

Author keywords

I V curves; Interface; Irradiation; Swift heavy ions

Indexed keywords

INTERFACES (MATERIALS); ION BEAMS; SINGLE CRYSTALS; SUBSTRATES; TITANIUM COMPOUNDS;

I-V CURVES; ION BEAM MIXING; SWIFT HEAVY IONS; TITANIUM SILICIDE;

SILICON;

EID: 27944433089     PISSN: 09704140     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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