Investigation of the mechanism of titanium suicide reaction using ion-beam-assisted deposition

Applied Physics Letters

Volumn 75, Issue 19, 1999, Pages 2900-2902

  Chang, Jaeho ^a   Kim, Gi Bum ^a   Yoon, Dong Soo ^a   Baik, Hong Koo ^a   Yoo, Do Joon ^b   Lee, Sung Man ^b  

^a Yonsei University   (South Korea)

^b Kangwon National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001368722     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125184     Document Type: Article

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