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Thin Solid Films

Volumn 494, Issue 1-2, 2006, Pages 307-310

Fabrication of periodic nickel silicide nanodot arrays using nanosphere lithography

(6) Cheng, S L a Lu, S W a Li, C H a Chang, Y C a Huang, C K a Chen, H a

a NATIONAL CENTRAL UNIVERSITY (Taiwan)

Author keywords

Epitaxy; Nanosphere lithography; Nanowires; Silicide nanodots

Indexed keywords

ANNEALING; NANOSTRUCTURED MATERIALS; POLYSTYRENES; SILICON;

NANODOT ARRAYS; NANOPARTICLES; NICKEL SILICIDES;

NICKEL;

EID: 27844599705 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.08.158 Document Type: Conference Paper

Times cited : (11)

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