Evaluation of tantalum silicon alloy systems as gate electrodes

Applied Physics Letters

Volumn 87, Issue 21, 2005, Pages 1-3

  Luan, H ^a   Alshareef, H N ^a   Lysaght, P S ^a   Harris, H R ^a   Wen, H C ^a   Choi, K ^a   Senzaki, Y ^a   Majhi, P ^a   Lee, B H ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOY SYSTEMS; ELECTRODE LAYER; GATE DIELECTRICS; GATE ELECTRODES;

COMPOSITION; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; ELECTRODES; FUNCTIONS; SILICON;

TANTALUM ALLOYS;

EID: 27844586492     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2126132     Document Type: Article

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