Diffusion barrier properties of amorphous ZrCN films for copper metallization

Journal of Non-Crystalline Solids

Volumn 351, Issue 49-51, 2005, Pages 3725-3729

  Chen, Cheng Shi ^a   Liu, Chuan Pu ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; DIFFUSION; ELASTIC MODULI; MICROSTRUCTURE; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

AMORPHOUS PHASE; ZIRCONIUM CARBON NITRIDES (ZRCN);

AMORPHOUS FILMS;

EID: 27844496673     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.09.032     Document Type: Article

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