Thin film gas chemical sensors based on resistive or optical detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5830, Issue , 2005, Pages 40-49

  Jelinek, Miroslav ^a   Kocourek, Tomáš ^a   Myslík, Vladimír ^b   Vrňata, Martin ^b   Fryček, Rudolf ^b   Komenda, Vit ^b   Vysloužil, Filip ^b   Manzingue, Thomas ^c   Escoubas, Ludovic ^c   Flory, Francois ^c  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b INSTITUTE OF CHEMICAL TECHNOLOGY   (Czech Republic)

^c Ecole Centrale Marseille   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; PULSED LASER DEPOSITION; THIN FILMS;

OPTICAL DETECTION; ORGANIC LAYERS; THIN FILM GAS SENSORS;

CHEMICAL SENSORS;

EID: 27744577356     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.617200     Document Type: Conference Paper

References (40)

1. 2 sensors: current status and future prospects", Sens. Actuators B 26/27, pp. 1-12, 1995.
2. N. Inagaki, S. Tasana, K. Suzuki, preparation and properties of plasma deposited films prepared from tin acetylacetonate dichloride for use in CO gas senzore", J. Polym. Sci.-Appl. Polym. Symp. 46, pp. 173-192, 1990.
3. N. Inagaki, S. Tasana, Y. Nozue, "Plasma polymerization of metal acetylacetonates and application for sensor device". J. Appl. Polym. Sci. 45, pp. 1041-1048, 1992.
4. H. Kawasaki, T. Ueda, T. Suda, T. Ohshima, "Properties of metal doped oxide thin films for NOx gas sensors grown by PLD method combined with sputtering process", Sensors and Actuators B 100, pp. 266-269, 2004.
5. Y. Suda, H. Kawasaki, J. Namba, K. Iwatsuji, K.Doi, K. Wada, "Properties of palladium tin oxide thin films for gas sensors grown by PLD method combined with sputtering process", Surface and coating technology 174-175, pp. 1293-1296. 2003.
6. th International Laser Physics Workshop LPHYS 04, Trieste 2004. Laser Physics- in print.
7. D.B. Chrisey, G.K. Hubbler (eds), Pulsed laser Deposition of Thin Films, John Wiley& Sons, Inc., New York, 1994.
8. M. Vrňata, V. Myslík, F. Vysloužil and M. Jelínek, "Laser deposited tin acetyl acetonate films as active layers of gas senzore". J. Elect. Eng. 49, pp. 340-343, 1998.
9. V. Myslík, M. Vrňata, F. Vysloužil, M Jelínek and M. Novotná, "Pulsed-laser deposition of metal acetylacetonates for sensor device", J. Appl. Polym. Sci. 74, pp. 1614-1622, 1999.
10. M. Vrňata, V. Myslík, F. Vysloužil, M. Jelínek, J. Lančok, J. Zemek, "The response of tin acetylacetonate and tin dioxide-based gas sensors to hydrogen and alcohol vzpoura", Sens. Actuators B: Chem. 71, pp. 24-30, 2000.
11. V. Myslík, F. Vysloužil, M. Vrňata, M. Jelínek, J. Lančok, "Laser created thin film sensors based on Sn and indium compounds", Laser Physics 12, pp. 329-333, 2002.
12. 2 and SnAcAc thin film sensors created by laser methods", Molecular Crystal & Liquid Crystals, 374, pp. 285-288, 2002.
13. Dae- Sik Lee. Jung- Hee Lee, Yong- Hyun Lee, Duk- Dong Lee, "GaN thin films as gas sensors", Sensors and Actuators B 89, pp. 305-310, 2003
14. 2 thin films for CO", J. Vac. Sci. Technol. A 14(4), pp. 2215- 2219, 1996.
15. Y. Min, H.L. Tuller, S. Falzer, J. Wollenstein, H. Bottner, "Gas response of reactively sputtered ZnO films on Si-based micro- array", Sensors and Actuators B 93, pp. 435-441, 2003.
16. V. Myslík, F. Vysloužil, M. Vrňata, Z. Rozehnal, M. Jelínek, R. Fryček, M. Kovanda, "Phase ac- sensitivity of oxidic acetylacetonate gas senzors", Senzors and actuators B 89, pp. 205-211, 2003.
17. Vysloužil F., M. Vrňata, V. Myslík, M. Jelínek "The Laser Deposited Thin Dioxide and Thin Acelylacetonate Layers for Gas Sensors", Journal of Materials Science: Materials in Electronics 11, pp. 703-708, 2000.
18. Vrňata M., V. Myslík, F. Vysloužil, M. Jelínek, J.Lančok, J.Zemek "The response of tin dioxide- based gas sensors to hydrogen and alcohol vapors", Sensors and Actuators B 71, pp. 24-30, 2000.
19. R. Fryček, V. Myslík, M. Vrňata, F. Vysloužil, M. Jelínek, T. Kocourek "Pulsed Laser deposition of Inorganic Thin Films for Aktive layers of Ozone Senzore", Solid State Phenomena 90-91, pp. 541-546, 2003.
20. M. Vrňata, V. Myslik, F.Vysloužil, M.Kovanda, R. Fryček, M.Jelinek, T.Kocourek "Laser Processed Active Layers of Chemical Sensors", Thin Solid Films, 2004, in print.
21. F.Vysloužil, M. Vrňata, V.Myslík, M.Jelínek, J.Zemek, J.Lančok, "Gas sensitive thin inorganic and organic layers prepared by pulsed laser deposition", Superficies y Vacio 9, pp. 263- 266, 1999.
22. Th.C. Brown, K. Cream, H. Kogelnik, M.A. Kriss, J. Schmit, M.J. Weber, The Optics Encyclopedia, Wiley- VCH Verlag GmbH &Co. KGaA, 2004
23. F. Flory, "Characterization: guided wave techniques" in "Thin films for optical systems," F. Flory (edit.). Marcel Dekker Inc. USA, 1995.
24. E. Drouard, P. Huguet-Chantôme, L. Escoubas, F. Flory, "Guided wave ∂n/∂T measurements and application to optical telecommunications," Appl. Opt, 41, pp. 3132-3136, 2002.
25. 2 thin films for LPG detection", Thin Solid Films 349, pp. 260-265, 1999.
26. R.S. Niranjan, I.S. Mulla, "Spin coated tin oxide: a highly sensitive hydrocarbon sensor", Materials Science and Engineerings B 103, pp. 103-107, 2003.
27. N. Yamazoe, Y. Kurokawa, T. Seiyama, "Effects of additives on semiconductor gas senzors", Sensors and Actuators 4, pp. 283-289, 1983.
28. Y. Jiao, M. Wu, J. Gu, X. Sun, "The gas sensing characteristics of ITO thin film prepared by sol-gel Method", Sensors and Actuators B 94, pp. 216-221, 2003.
29. P. Mitra, H.S. Maiti, "A wet-chemical process to form palladium oxide sensitiser layer on thin film zinc oxide based LPG sensor", Sensors and Actuators B 97, pp. 49-58, 2004.
30. L.F. Dong, Z.L. Cui, Z.K. Zhank, "Gas sensing properties of nano-ZnO prepared by arc plasma Metod", Nanostructured Materials 8, pp. 815-823, 1997.
31. 2 and LPG gas sensor", Sensors and Actuators E 84, pp. 95-97, 2002.
32. 3", Sensors and Actuators B 101, pp. 161-174, 2004.
33. 4-based isobutane sensor operating at low temperatures", Sensors and Actuators B 77, pp. 330-334, 2001.
34. 4: a new sensor material", Sensors and Actuators B 55, pp. 170-174, 1999.
35. 4", Sensors and Actuators B 46, pp. 1-7, 1998.
36. 4 Spinel Porous Compacts for Use in Humidity Senzore", Br. Ceram. Trans. 92, pp. 104-108, 1993.
37. 4: A novel material for the detection of liquefied petroleum gas in air", Materials Chemistry and Physics 82, pp. 21-26, 2003.
38. 3 based gas senzore", Applied Surface Science 174, pp 93-105, 2001.
39. 3 complex oxide semiconductors", Sensors and Actuators B 32, pp. 185-189, 1996.
40. 4:a material for liquefied petroleum gas sensing", Sensors and Actuators B 89, pp. 62-67, 2003.