Hybrid laser-based thin-film deposition for nanocrystalline titanium carbide layers

Laser Physics

Volumn 15, Issue 2, 2005, Pages 211-216

  Jelinek M ^a   Kocourek, T ^a   Bulir J ^a   Novotny M ^a   Vorlicek V ^a   Studnicka V ^a   Cernansky M ^a   Kadlec, J ^b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b MILITARY ACADEMY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; LASER BEAM EFFECTS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; PULSED LASER DEPOSITION; RAMAN SPECTROSCOPY; SILICON; THIN FILMS; X RAY DIFFRACTION;

HYBRID DEPOSITION SYSTEMS; NANOCOMPOSITE FILMS; PLASMA PLUMES; THIN FILM DEPOSITION;

TITANATE MINERALS;

EID: 16244384496     PISSN: 1054660X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (22)

1. D. B. Chrisey and G. K. Hubler, Pulsed Laser Deposition of Thin Films (Wiley, New York, 1994).
2. M. Jelínek, J. Lančok, J. Bulír, and M. Novotný, Laser Phys. 12, 306 (2002).
3. M. Jelínek, Proc. SPIE 4397, 285 (2001).
4. A. A. Voevodin and J. S. Zabinski, Diamond Relat. Mater. 7, 463 (1998).
5. A. A. Voevodin, J. J. Hu, T. A. Fitz, and J. S. Zabinski, J. Vac. Sci. Technol. A 258, 1434 (2002).
6. J. G. Jones and A. A. Voevodin, Surf. Coat. Technol. 184, 1 (2004).
7. A. A. Voevodin, J. J. Hu, T. A. Fitz, and J. S. Zabinski, Surf. Coat. Technol. 146/147, 351 (2001).
8. M. Jelínek, Laser Phys. 13, 1330 (2003).
9. Z. Xinhua, J. Zhu, S. Zhou, et al., Ferroelectrics 263, 67 (2001).
10. Y. Suda, H. Kawasaki, J. Namba, et al., Surf. Coat. Technol. 174-175, 1293 (2003).
11. H. Kawasaki, T. Ueda, Y. Suda, and T. Ohsima, Sens. Actuators B 100, 266 (2004).
12. W. J. Sessler, M. S. Donley, J. S. Zabinski, et al., Surf. Coat. Technol. 56, 125 (1993).
13. A. A. Voevodin, M. A. Capano, A. J. Safriet, et al., Appl. Phys. Lett. 69, 188 (1996).
14. A. A. Vojvodin, C. Rebholz, J. M. Schneider, and A. Matthews, Surf. Coat. Technol. 73, 185 (1995).
15. I. Zergiotti, C. Fotakis, and G. N. Haidemenopoulos, Thin Solid Films 303, 39 (1997).
16. R. Teghil, L. D'Alessio, M. Zaccagnino, et al., Appl. Surf. Sci. 173, 233 (2001).
17. J. Bulír, M. Jelínek, V. Vorlícek, et al., in Proceedings of NANO 04 Conference, Brno, 2004 (in press).
18. H. P. Klug and I. E. Alexander, X-ray Diffraction Procedures for Polycrystalline and Amorphous Materials (Wiley, New York, 1974).
19. A. C. Ferrari and J. Robertson, Phys. Rev. B 61, 14095 (2000).
20. M. V. Klein, J. A. Holy, and W. S. Williams, Phys. Rev. B 17, 1546 (1978).
21. H. Wipf, M. V. Klein, and W. S. Williams, Phys. Status Solidi B 108, 489 (1981).
22. A. A. Voevodin, S. V. Prasad, and J. S. Zabinski, J. Appl. Phys. 82, 855 (1997).