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Volumn 12, Issue 10, 2005, Pages 1-7

Grounded radio-frequency electrodes in contact with high density plasmas

Author keywords

[No Author keywords available]

Indexed keywords

DC-GROUNDED ELECTRODES; DIRECT CURRENT (DC); RF VOLTAGE; STEADY STATE;

EID: 27644586722     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2089227     Document Type: Article
Times cited : (18)

References (22)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.