Fluctuation in a Helicon plasma with additional immersed antenna

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 I, 2005, Pages 360-361

  Aanesland, Ane ^a   Charles, Christine ^a   Boswell, Rod ^a   Fredriksen, Åshild ^b  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b UNIVERSITY OF TROMSØ   (Norway)

Author keywords

Dual antenna generated plasmas; Fluctuations; Radio frequency plasma

Indexed keywords

ANTENNA FEEDERS; ANTENNAS; HELICONS; OSCILLATORS (ELECTRONIC); PHASE SHIFTERS; PROBES;

DUAL ANTENNA GENERATED PLASMAS; FLUCTUATIONS; HELICON ANTENNA; IMMERSED ANTENNA; RADIO FREQUENCY PLASMA;

PLASMAS;

EID: 18844458297     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845133     Document Type: Article

References (4)

1. S. Rauf and M. J. Kushner, "Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources," IEEE Trans. Plasma Sci., vol. 27, no. 5, pp. 1329-1338, Oct. 1999.
2. A. Aanesland, C. Charles, R. W. Boswell, and Å. Fredriksen, "Helicon plasma with additional immersed antenna," J. Phys. D, Appl. Phys., vol. 37, pp. 1334-1341, May 2004.
3. A. W. Degeling, T. E. Sheridan, and R. W. Boswell, "Model for relaxation oscillations in a helicon discharge," Phys. Plasmas, vol. 6, no. 5, pp. 1641-1648, May 1999.
4. A. W. Degeling, T. E. Sheridan, and R. W. Boswell, "Intense on-axis plasma production and associated relaxation oscillations in a large volume helicon source," Phys. Plasmas, vol. 6, no. 9, pp. 3664-3673, Sep. 1999.