메뉴 건너뛰기




Volumn 14, Issue 5, 2005, Pages 654-665

Characterization of N-doped polycrystalline diamond films deposited on microgrinding tools

Author keywords

Characterization; Cutting tools; Diamond; Microengineering; Surface engineering

Indexed keywords

MICROENGINEERING; MICROGRINDING TOOLS; SURFACE ENGINEERING; TOOL WEAR;

EID: 27644583442     PISSN: 10599495     EISSN: None     Source Type: Journal    
DOI: 10.1361/105994905X64585     Document Type: Article
Times cited : (3)

References (26)
  • 1
    • 0032187813 scopus 로고    scopus 로고
    • Time modulated CVD diamond processing of diamond
    • Q.H. Fan, E. Periera, and J. Gracio, Time Modulated CVD Diamond Processing of Diamond, J. Mater. Res., 1998, Vol 13 (No. 10), p 2787-2794
    • (1998) J. Mater. Res. , vol.13 , Issue.10 , pp. 2787-2794
    • Fan, Q.H.1    Periera, E.2    Gracio, J.3
  • 4
    • 0031617763 scopus 로고    scopus 로고
    • Surface engineering of diamond coated tools
    • N. Ali, W.Ahmed, I.U. Hassan, and C.A. Rego, Surface Engineering of Diamond Coated Tools, Surf. Eng., Vol 14 (No. 4), 1998, p 292
    • (1998) Surf. Eng. , vol.14 , Issue.4 , pp. 292
    • Ali, N.1    Ahmed, W.2    Hassan, I.U.3    Rego, C.A.4
  • 5
    • 0041309493 scopus 로고
    • Influence of gas phase parameters on diamond kinematics of thin diamond films deposited by MWCVD and HFCVD techniques
    • R. Beckmann, W. Kulisch, H.J. Frenck, and R. Kassing, Influence of Gas Phase Parameters on Diamond Kinematics of Thin Diamond Films Deposited by MWCVD and HFCVD Techniques, Diamond Relat. Mater., Vol 1, 1992, p 164-167
    • (1992) Diamond Relat. Mater. , vol.1 , pp. 164-167
    • Beckmann, R.1    Kulisch, W.2    Frenck, H.J.3    Kassing, R.4
  • 8
    • 0004881434 scopus 로고    scopus 로고
    • Influence of nitrogen additions on HFCVD diamond
    • B. Bohr, R. Haubner, and B. Lux B, Influence of Nitrogen Additions on HFCVD Diamond, Appl. Phys. Lett., Vol 68 (No 8), 1996, p 1075-1077
    • (1996) Appl. Phys. Lett. , vol.68 , Issue.8 , pp. 1075-1077
    • Bohr, B.1    Haubner, R.2    Lux, B.3
  • 9
    • 27644590811 scopus 로고
    • Diamond deposition to silicon
    • W.A. Yarbrough and R. Messier R., Diamond Deposition to Silicon, Science, Vol 247, 1988, p 688
    • (1988) Science , vol.247 , pp. 688
    • Yarbrough, W.A.1    Messier, R.2
  • 11
    • 21544452903 scopus 로고
    • Textured growth of diamond on silicon via in situ carburization and bias enhanced nucleation
    • S.D. Wolter, B.R. Stoner, J.T. Glass, P.J. Ellis, D.S. Jenkins, and P. Southworth, Textured Growth of Diamond on Silicon via in situ Carburization and Bias Enhanced Nucleation, Appl. Phys. Lett., Vol 62, 1993, p 1215-1217
    • (1993) Appl. Phys. Lett. , vol.62 , pp. 1215-1217
    • Wolter, S.D.1    Stoner, B.R.2    Glass, J.T.3    Ellis, P.J.4    Jenkins, D.S.5    Southworth, P.6
  • 13
    • 36449004320 scopus 로고
    • Heteroepitaxial nucleation of diamond on Si (001) in HFCVD
    • F. Stubhan, M. Ferguson, H.J. Fusser, and R.J. Behom, Heteroepitaxial Nucleation of Diamond on Si (001) in HFCVD, Appl. Phys. Lett., Vol 66, 1995, p 1900-1902
    • (1995) Appl. Phys. Lett. , vol.66 , pp. 1900-1902
    • Stubhan, F.1    Ferguson, M.2    Fusser, H.J.3    Behom, R.J.4
  • 14
    • 0031210896 scopus 로고    scopus 로고
    • Analysis of oriented diamond nucleation processes on silicon substrates by HFCVD
    • X. Li, Y. Hayashi, and S. Nishino, Analysis of Oriented Diamond Nucleation Processes on Silicon Substrates by HFCVD, Jpn. J. Phys., Vol 36, 1997, p 5197-5201
    • (1997) Jpn. J. Phys. , vol.36 , pp. 5197-5201
    • Li, X.1    Hayashi, Y.2    Nishino, S.3
  • 15
    • 21544478131 scopus 로고
    • Nitrogen stabilized (100) texture in CVD diamond films
    • R. Locher, C. Wild, N. Herres, D. Behr, and P. Koidl, Nitrogen Stabilized (100) texture in CVD Diamond Films, Appl. Phys. Lett., Vol 65, 1994, p 34-36
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 34-36
    • Locher, R.1    Wild, C.2    Herres, N.3    Behr, D.4    Koidl, P.5
  • 16
    • 21544461040 scopus 로고
    • Effect of nitrogen on the growth of diamond films
    • S. Jin and T.D. Moustakas, Effect of Nitrogen on the Growth of Diamond Films, Appl. Phys. Lett., Vol 65, 1994, p 403-405
    • (1994) Appl. Phys. Lett. , vol.65 , pp. 403-405
    • Jin, S.1    Moustakas, T.D.2
  • 17
    • 0028419336 scopus 로고
    • Characterization of undoped and doped homoepitaxial diamond layers produced by microwave plasma CVD
    • T.H. Borst, P.C. Munzinger, and O. Weiss, Characterization of Undoped and Doped Homoepitaxial Diamond Layers Produced by Microwave Plasma CVD, Diamond Relat. Mater., Vol 3, 1994, p 515-519
    • (1994) Diamond Relat. Mater. , vol.3 , pp. 515-519
    • Borst, T.H.1    Munzinger, P.C.2    Weiss, O.3
  • 19
    • 0009718433 scopus 로고
    • Grindability of tool steels
    • L.P. Tarasov, Grindability of Tool Steels, American Society of Metals, Vol 43, 1951, p 1144-1151
    • (1951) American Society of Metals , vol.43 , pp. 1144-1151
    • Tarasov, L.P.1
  • 21
    • 0015160396 scopus 로고
    • The wear of grinding wheels - Part 1: Attritious wear
    • S. Malkin and N.H. Cook, The Wear of Grinding Wheels - Part 1: Attritious Wear, Trans. A.S.M.E. J. Eng. Ind., Vol 93, 1971, p 1120-1128
    • (1971) Trans. A.S.M.E. J. Eng. Ind. , vol.93 , pp. 1120-1128
    • Malkin, S.1    Cook, N.H.2
  • 22
    • 1842574500 scopus 로고    scopus 로고
    • Vitrification heat treatment during the manufacture of corundum grinding wheels
    • M.J. Jackson, Vitrification Heat Treatment during the Manufacture of Corundum Grinding Wheels, J. Mfg. Proc., Vol 3, 2001, p 17-28
    • (2001) J. Mfg. Proc. , vol.3 , pp. 17-28
    • Jackson, M.J.1
  • 23
    • 0004097994 scopus 로고
    • International Student Edition, McGraw-Hill Kogakusha, Tokyo, Japan
    • S.P. Timoshenko and J.N. Goodier, Theory of Elasticity, 3rd ed., International Student Edition, McGraw-Hill Kogakusha, Tokyo, Japan 1970, p 109-113, 139-144
    • (1970) Theory of Elasticity, 3rd Ed. , pp. 109-113
    • Timoshenko, S.P.1    Goodier, J.N.2
  • 25
    • 0000357002 scopus 로고
    • The phenomena of rupture and flow in solids
    • A.A. Griffith, The Phenomena of Rupture and Flow in Solids, Philos. Trans. R. Soc. London, Vol A221, 1921, p 163-198
    • (1921) Philos. Trans. R. Soc. London , vol.A221 , pp. 163-198
    • Griffith, A.A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.