Analyses of an oriented diamond nucleation processes on Si substrate by hot filament chemical vapor deposition

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 8, 1997, Pages 5197-5201

  Li, Xi ^a   Hayashi, Yasuaki ^a   Nishino, Shigehiro ^a  

^a KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Bias enhanced nucleation; Diamond film; Ellipsometry; Heteroepitaxy; Monitoring; Plasma

Indexed keywords

BIAS ENHANCED NUCLEATION (BEN); HETEROEPITAXY; HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HF CVD);

CARBONIZATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; ELLIPSOMETRY; EPITAXIAL GROWTH; FILM GROWTH; NUCLEATION; PLASMAS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SUBSTRATES; TWINNING;

DIAMOND FILMS;

EID: 0031210896     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.5197     Document Type: Article

References (18)

1. F. Arezzo, N. Zacchetti and W. Zhu: J. Appl. Phys. 75 (1994) 5375.
2. B. R. Stoner, G.-H. M. Ma, S. D. Wolter and J. T. Glass: Phys. Rev. B 45 (1995) 11067.
3. P. John, D. K. Milne, I. C. Drummond, M. G. Jubber, J. I. B. Wilson and J. A. Savage: Diamond Relat. Mater. 3 (1994) 486.
4. P. John, C. Graham, D. K. Milne, M. G. Jubber and J. I. B. Wilson: Diamond Relat. Mater. 5 (1996) 256.
5. W. Kulisch, B. Sobisch, M. Kuhr and R. Beckmann: Diamond Relat. Mater. 4 (1994) 401.
6. J. Robertson: Diamond Relat. Mater. 4 (1995) 549.
7. S. Yugo, T. Kanai, T. Kimura and T. Muto: Appl. Phys. Lett. 58 (1995) 1036.
8. X. Jiang, K. Schiffman and C.-P. Klages: Phys. Rev. B 50 (1994) 8402.
9. B. R. Stoner, G. -H. M. Ma, S. D. Wolter, W. Zhu, Y.-C. Wang, R. F. Davis and J. T. Glass: Diamond Relat. Mater. 2 (1993) 142.
10. S. Yugo, T. Kimura and T. Kanai: Diamond Relat. Mater. 2 (1993) 328.
11. Y. Hayashi, W. Drawl, R. W. Collins and R. Messier: Appl. Phys. Lett. 60 (1992) 2868.
12. X. Li, T. Miyagi and Y. Hayashi: Jpn. J. Appl. Phys. 36 (1997) L8.
13. R. W. Collins, Y. Cong, H. V. Nguyen, I. An, K. Vedam, T. Badzian and R. Messier: J. Appl. Phys. 71 (1992) 5287.
14. Y. Hayashi, X. Li and S. Nishino: in preparation for publication.
15. Y. Shigesato, R. E. Boekenhauer and B. W. Sheldon: Appl. Phys. Lett. 63 (1993) 314.
16. S. Yugo, K. Semoto, K. Hoshina, T. Kimura and H. Nakai: Diamond Relat. Mater. 4 (1995) 903.
17. Q. Chen, J. Yang and Z. Lin: Appl. Phys. Lett. 67 (1995) 1853.
18. R. Stökel, K. Janischowsky, S. Rohmfeld, J. Ristein, M. Hundhausen and L. Ley: Diamond Relat. Mater. 5 (1996) 321.