Interferometric detection in picosecond ultrasonics for nondestructive testing of submicrometric opaque multilayered samples: TiN/AlCu/TiN/Ti/Si

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 8, 2005, Pages 1354-1359

  Rossignol, Clément ^a   Perrin, Bernard ^b,c  

^a UNIVERSITÉ DE BORDEAUX   (France)

^b SORBONNE UNIVERSITÉ   (France)

^c CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

NANOMETRIC THIN FILMS; PICOSECOND ULTRASONIC TECHNIQUES; SUBMICROMETRIC LAYERS;

ELLIPSOMETRY; FREQUENCIES; INTERFEROMETERS; OPTICAL PUMPING; PHOTOELASTICITY; REFLECTION; ULTRASONIC EFFECTS;

THIN FILMS;

EID: 27644564188     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1509794     Document Type: Article

References (23)

1. C. Thomsen, J. Strait, Z. Vardeny, H. J. Maris, and J. Taue, "Coherent phonon generation and detection by picosecond light pulses," Phys. Rev. Lett., vol. 53, pp. 989-992, 1984.
2. C. Thomsen, H. T. Grahn, H. J. Maris, and J. Tauc, "Surface generation and detection of phonons by picosecond light pulses," Phys. Rev. B, vol. 34, pp. 4129-4138, 1986.
3. H. T. Grahn, H. J. Maris, and J. Tauc, "Picosecond ultrasonics," IEEE J. Quantum Electron., vol. 25, pp. 2562-2568, 1989.
4. G. L. Eesley, B. M. Clemens, and C. A. Paddock, "Generation and detection of picosecond acoustic pulses in thin metal films," Appl. Phys. Lett., vol. 50, pp. 717-719, 1987.
5. H. J. Maris, "Picosecond ultrasonics," Sci. Amer., vol. 278, pp. 64-67, 1998.
6. B. Bonello, B. Perrin, and C. Rossignol, "Photothermal properties of bulk and layered materials by the picosecond acoustics technique," J. Appl. Phys., vol. 83, pp. 3081-3088, 1998.
7. B. Perrin, B. Bonello, J.-C. Jeannet, and E. Romatet, "Picosecond ultrasonics study of metallic multilayers," Physica B, vol. 219&220, pp. 681-683, 1996.
8. R. M. Slayton, A. A. Maznev, and K. A. Nelson, "Transient grating measurements of film thickness in multi-layer metal films," J. Appl. Phys., vol. 90, pp. 4392-4402, 2001.
9. C. J. Morath, G. J. Collins, R. G. Wolf, and R. J. Stoner, "Ultrasonic multilayer metal film metrology," Solid State Technal., vol. 40, pp. 85-92, 1997.
10. H.-Y. Hao, H. J. Maris, and D. K. Sadana, "Nondestructive evaluation of interfaces in bonded silicon-on-insulator structures using the picosecond ultrasonics technique," Electrochem. Solid State Lett., vol. 1, pp. 54-55, 1998.
11. B. Perrin, B. Bonello, J.-C. Jeannet, and E. Romatet, "Interferometric detection of hypersound waves in modulated structures," Prog. Natural Sci., vol. 6, pp. 444-448, 1996.
12. B. Perrin, C. Rossignol, B. Bonello, and J.-C. Jeannet, "Interferometric detection in picosecond ultrasonics," Physica B, vol. 263/264, pp. 571-573, 1999.
13. C. J. K. Richardson, M. J. Ehrlich, and J. W. Wagner, "Interferometric detection of ultrafast thermoelastic transients in thin films: Theory with supporting experiment," J. Opt. Soc. Amer. B, vol. 16, pp. 1007-1015, 1999.
14. D. H. Hurley and O. B. Wright, "Detection of ultrafast phenomena by use of a modified Sagnac interferometer," Opt. Lett., vol. 24, pp. 1305-1307, 1999.
15. M. Nikoonahad, S. Lee, and H. Wang, "Picosecond photoacoustics using common-path interferometry," Appl. Phys. Lett., vol. 76, pp. 514-516, 2000.
16. x at the Al/Si interface," Appl. Phys. Lett, vol. 61, pp. 1787-1789, 1992.
17. B. Bonello, F. Armand, J.-P. Pradeau, H. Perez, B. Perrin, and G. Louis, "Evidence for the alteration of an organic/metal interface resulting from the formation of a broad interfacial layer," J. Appl. Phys., vol. 86, pp. 4959-4963, 1999.
18. L. Sarger, P. Segonds, L. Canioni, F. Adamietz, A. Ducasse, C. Duchesne, E. Fargin, R. Olazcuaga, and G. Le Flem, "Time-resolved absolute interferometric measurement of third-order nonlinear-optical susceptibilities," J. Opt. Soc. Amer., vol. 11, pp. 995-999, 1994.
19. CRC Handbook of Chemistry and Physics. 79th ed. D. R. Lide, Ed. New York: CRC, 1998-1999.
20. O. L. Anderson, "Determination and some uses of isotropic elastic constants of polycristalline aggregates using single-crystal data," in Physical Acoustics, vol. 3B, W. P. Masson, Ed. New York: Academic, 1965, pp. 43-95.
21. 1-x)N superlattices," Phys. Rev. B, vol. 48, pp. 1726-1737, 1993.
22. G. Tas and H. J. Maris, "Electron diffusion in metals studied by picosecond ultrasonics," Phys. Rev. B, vol. 49, pp. 15046-15054, 1994.
23. O. B. Wright and V. E. Gusev, "Ultrafast generation of acoustic waves in copper," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 42, pp. 331-338, 1995.