Handling processes in microsystems technology

IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM

Volumn 1, Issue , 2005, Pages 384-389

  Bou, Silvia C ^a   Almansa, Ana ^a   Balabanava, Natallia ^b   Rymuza, Zygmunt ^b  

^a ARC SEIBERSDORF RESEARCH GMBH   (Austria)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

HANDLING PROCESS; HANDLING TOOLS; MICROMETER; MICROSYSTEMS TECHNOLOGY;

ADHESION; TRIBOLOGY;

MICROELECTROMECHANICAL DEVICES;

EID: 27644432259     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)

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