Micro force sensor with piezoresistive amorphous carbon strain gauge

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 551-554

  Peiner, E ^a   Tibrewala, A ^a   Bandorf, R ^b   Biehl, S ^b   Luthje H ^b   Doering, L ^c  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

^b FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Amorphous carbon; Bulk silicon micromachining; Micro force sensor; Piezoresistive gauge factor

Indexed keywords

AMORPHOUS CARBON; BULK SILICON MICROMACHINING; MICRO FORCE SENSORS; PIEZORESISTIVE GAUGE FACTOR;

AMORPHOUS MATERIALS; CARBON; FORCE MEASUREMENT; MEMBRANES; SPUTTER DEPOSITION; STRAIN GAGES;

SENSORS;

EID: 27544501312     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496476     Document Type: Conference Paper

References (11)

1. W. Wang, Y. Wang, H. Bao, B. Xiong, M. Bao, "Friction an wear properties in MEMS", Sensors and Actuators A 97-98, (2002) 486-491.
2. I. S. Forbes, J. I. B. Wilson, "Diamond and hard carbon films for microelectromechanical systems (MEMS) - a nanotribological study", Thin Solid Films 420-421, (2002) 508-514.
3. M. R. Werner, W. R. Fahrner, "Review on Materials, Microsensors, Systems and Devices for High-Temperature and Harsh-Environment Applications", IEEE Trans. Industrial Electronics 48, (2001) 249-257.
4. T. Shibata, Y. Kitamoto, K. Unno, E. Makino, "Micromachining of Diamond Films for MEMS Applications", J. Microelectromech. Syst. 9, (2000) 47-51.
5. A. Yamamoto, T. Tsutsumoto, "Piezoresistive effect of CVD polycrystalline diamond films", Diamond and Related Materials 13, (2004) 863-866.
6. P. Alpuim, V. Chu, J.P. Conde, "Piezoresistive Sensors on Plastic Substrates Using Doped Microcrystalline Silicon", IEEE Sensors J. 2, (2002) 336-341.
7. R. Bandorf, H. Lüthje, C. Henke, J.-H. Sick, R. Küster, "Tribological behaviour of thin a-C and a-C:H films with different topographic structure under rotating and oscillating motion for dry lubrication", Surf. Coat. Technol. 188-189, (2004) 530-533.
8. C. Grimaldi, P. Ryser, S. Strässler, Gauge factor of thick film resistors: outcomes of the variable range hopping model", J. Appl. Phys. 88, (2000) 4164-4169.
9. J. Robertson, "Electronic and atomic structure of diamond-like carbon", Semicond. Sci. Technol. 18, (2003) S12-S19.
10. I. Behrens, L. Doering, E. Peiner, "Piezoresistive cantilever as portable micro force calibration standard", J. Micromech. and Microeng. 13, (2003) 171-177.
11. E. Peiner, L. Doering, "Force Calibration of Stylus Instruments using Silicon Microcantilevers", Sens. Actuators (2005), in print.