Growth and silicon doping of AlGaN films in the entire alloy composition by molecular beam epitaxy

Physica Status Solidi C: Conferences

Volumn 2, Issue 7, 2005, Pages 2220-2223

  Xu, T ^a   Thomidis, C ^a   Friel, I ^b   Moustakas, T D ^a  

^a Boston University   (United States)

^b Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DOPING (ADDITIVES); MOLECULAR BEAM EPITAXY; OXYGEN; SAPPHIRE; SECONDARY ION MASS SPECTROMETRY; SILICON; SUBSTRATES; X RAY DIFFRACTION ANALYSIS;

ALGAN FILMS; SILICON CELLS; SILICON DOPING;

ALUMINUM COMPOUNDS;

EID: 27344451700     PISSN: 16101634     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1002/pssc.200461595     Document Type: Conference Paper

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