Light-ion beam for microelectronic applications

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 240, Issue 1-2, 2005, Pages 265-270

  Hirsch, L ^a   Tardy, P ^a   Wantz, G ^a   Huby, N ^a   Moretto, P ^b   Serani, L ^b   Natali, F ^c   Damilano, B ^c   Duboz, J Y ^c   Reverchon, J L ^d  

^a UNIVERSITÉ BORDEAUX 1   (France)

^b CENTRE D ETUDES NUCLÉAIRES DE BORDEAUX GRADIGNAN   (France)

^c CRHEA CNRS   (France)

^d THALES RESEARCH AND TECHNOLOGY   (France)

Author keywords

ALGaN; Bragg reflectors; IBIC; RBs; UV detectors

Indexed keywords

LIGHT EMITTING DIODES; MICROELECTRONICS; PHOTODETECTORS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; ULTRAVIOLET DETECTORS;

ALGAN; BRAGG REFLECTORS; IBIC; TILT ANGLES;

ION BEAMS;

EID: 27344446652     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.06.127     Document Type: Conference Paper

References (15)

1. L. Hirsch, A.S. Barrière, P. Moretto, B. Damilano, N. Grandjean, J. Massies, and J.Y. Duboz Phys. Stat. Sol. (a) 188 2001 171
2. L. Hirsch, F. Natali, P. Moretto, A.S. Barrière, D. Byrne, F. Semond, J. Massies, N. Grandjean, N. Antoine-Vincent, and J. Leymarie Phys. Stat. Sol. (a) 195 2003 502
3. L. Hirsch, A.S. Barrière, and P. Moretto Phys. Stat. Sol. (a) 186 2001 461
4. D. Byrne, F. Natali, B. Damilano, A. Dussaigne, N. Grandjean, and J. Massies Jpn. J. Appl. Phys. 42 2003 L1509
5. F. Natali, D. Byrne, A. Dussaigne, N. Grandjean, J. Massies, and B. Damilano Appl. Phys. Lett. 82 2003 499
6. N. Grandjean, M. Leroux, M. Laügt, and J. Massies Appl. Phys. Lett. 71 1997 240
7. J.F. Ziegler, J.P. Biersack, and U. Littmark The Stopping and Range of Ions in Solids 1985 Pergamon Press New York
8. W.K. Chu, J.W. Mayer, and M.A. Nicolet Backscattering Spectrometry 1978 Academic Press New York
9. N.P. Barradas, C. Jeynes, O.A. Mironov, P.J. Phillips, and E.H.C. Parker Nucl. Instr. and Meth. B 139 1998 239
10. W. Sakai, K. Nakajima, M. Suzuki, and K. Kimura Nucl. Instr. and Meth. B 219&220 2004 369
11. L.R. Doolittle Nucl. Instr. and Meth. B 15 1986 227
12. F. Natali, Thesis, Nice-Sophia Antipolis, 2003.
13. E. Monroy, F. Calle, E. Muñoz, and F. Omnès Appl. Phys. Lett. 74 1999 3401
14. R.P. Joshi J. Appl. Phys. 76 1994 4434
15. A. Cremades, M. Albrecht, J. Krinke, R. Dimitrov, M. Stutzmann, and H.P. Strunk J. Appl. Phys. 87 2000 2357