Low-temperature pathways to Ge-rich Si 1-x Ge x alloys via single-source hydride chemistry

Applied Physics Letters

Volumn 87, Issue 18, 2005, Pages 1-3

  Hu, C W ^a   Menndez J ^a   Tsong, I S T ^a   Tolle, J ^a   Chizmeshya, A V G ^a   Ritter, Cole ^a   Kouvetakis, J ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LOW-ENERGY ELECTRON MICROSCOPY ANALYSIS; SINGLE-SOURCE HYDRIDE CHEMISTRY;

CRYSTAL ORIENTATION; HYDRIDES; MOLECULAR STRUCTURE; SEMICONDUCTING GERMANIUM; SILANES;

SILICON ALLOYS;

EID: 27344443703     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2117620     Document Type: Article

References (10)

1. B. S. Meyerson, IBM J. Res. Dev. 44, 391 (2000).
2. P. M. Mooney and J. O. Chu, Annu. Rev. Mater. Sci. 30, 335 (2000).
3. R. M. Tromp and F. M. Ross, Annu. Rev. Mater. Sci. 30, 431 (2000).
4. M. T. Currie, S. B. Samavedam, T. A. Langdo, C. W. Leitz, and E. A. Fitzgerald, Appl. Phys. Lett. 72, 1718 (1998).
5. M. L. Lee, A. J. Pitera, and E. A. Fitzgerald, J. Vac. Sci. Technol. B 22, 158 (2004).
6. J. Murota and S. Ono, Jpn. J. Appl. Phys., Part 1 33, 2290 (1994).
7. H. Kim, N. Taylor, T. R. Bramblett, and J. E. Greene, J. Appl. Phys. 84, 6372 (1998).
8. C. S. Peng, Z. Y. Zhao, H. Chen, J. H. Li, Y. K. Li, W. Guo, D. Y. Dai, Q. Huang, and J. M. Zhou, Appl. Phys. Lett. 72, 3160 (1998).
9. H. Kim, P. Desjardins, J. R. Abelson, and J. E. Greene, Phys. Rev. B 58, 4803 (1998).
10. H. K. Shin, D. J. Lockwood, and J.-M. Baribeau, Solid State Commun. 114, 505 (2000).