Residual stresses of diamond and diamondlike carbon films

Journal of Applied Physics

Volumn 98, Issue 7, 2005, Pages

  Liu, E ^a   Li, L ^a   Blanpain, B ^b   Celis, J P ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDING; DIAMOND COATINGS; MICRO-RAMAN SPECTROSCOPY; MICROWAVE CHEMICAL VAPOR DEPOSITION;

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; COATINGS; MOLYBDENUM PLATING; PLASMA JETS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; SILICON WAFERS; STRUCTURAL ANALYSIS; TUNGSTEN CARBIDE; X RAY DIFFRACTION;

DIAMOND LIKE CARBON FILMS;

EID: 27144553745     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2071451     Document Type: Article

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