Contact printed masks for 3D microfabrication in negative resists

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 556-559

  Haefliger, D ^a   Boisen, A ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRIC RESISTANCE; EVAPORATION; FABRICATION; FLUIDIC DEVICES; PHOTOLITHOGRAPHY; STRESS ANALYSIS; ULTRAVIOLET RADIATION;

CONTACT PRINTED MASKS; MEMBRANE SURFACES; METAL MASKS; MICROFLUIDIC SYSTEMS;

MASKS;

EID: 26844550916     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. L. J. Guérin, M. Bossel, D. Demierre, S. Calmes, P. Renaud, "Simple and low cost fabrication of embedded microchannels by using a new thick-film photoplastic", in Digest Tech. Papers Transducers '97 Conference, Chicago, USA, June 16-19, 1997, pp. 1419-1422.
2. J. Thaysen, R. Marie, A. Boisen, "Cantilever-based biochemical sensor integrated in a microliquid handling system", in Digest Tech. Papers IEEE MEMS 2001 Conference, Interlaken, Switzerland, January 21-25, 2001, pp. 401-404.
3. M. Calleja, P. Rasmussen, A. Johansson, A. Boisen, "Polymeric mechanical sensors with integrated readout in a microfluidic system", Proc. SPIE, vol, 5116, pp. 314-321, 2003.
4. F. E. H. Tay, J. A. van Kan, F. Watt, W. O. Choong, "A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels", J. Micromech. Microeng., vol. 11, pp. 27-32, 2001.
5. Y. J. Chuang, F. G. Tseng, J. H. Cheng, W. K. Lin, "A novel fabrication method of embedded micro-channels by using SU-8 thick-film photoresists", Sensors Actuators A, vol. 103, pp. 64-69, 2003.
6. H. Yu, O. Balogun, B. Li, T. W. Murray, X. Zhang, "Building embedded microchannels using a single layered SU-8, and determining Young's modulus using a laser acoustic technique", J. Micromech. Microeng., vol. 14, pp. 1576-1584, 2004.
7. W. H. Teh, U. Dürig, G. Salis, R. Harbers, U. Drechsler, R. F. Mahrt, C. G. Smith, J. H. Güntherodt, "SU-8 for real three-dimensional subdiffraction-limited two-photon microfabrication", Appl. Phys. Lett., vol. 84, pp. 4095-4097, 2004.
8. H. A. Reed, C. E. White, V. Rao, S. A. Bidstrup Allen, C. L. Henderson, P. A. Kohl, "Fabrication of micro-channels using polycarbonates as sacrificial materials", J. Micromech. Microeng., vol. 11, pp. 733-737, 2001.
9. Y. L. Loo, R. L. Willett, K. W. Baldwin, J. A. Rogers, "Additive, nanoscale patterning of metal films with a stamp and a surface chemistry mediated transfer process: Applications in plastic electronics", Appl. Phys. Lett., vol. 81, pp. 562-564, 2002.