Development of a versatile atomic force microscope within a scanning electron microscope

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 6 B, 2000, Pages 3747-3749

  Fukushima, Kimitake ^a   Saya, Daisuke ^a   Kawakatsu, Hideki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Atomic force microscope; Scanning electron microscope

Indexed keywords

ACTUATORS; ATOMIC FORCE MICROSCOPY; PIEZOELECTRIC DEVICES; REMOTE CONTROL; SCANNING ELECTRON MICROSCOPY;

OPTICAL LEVER METHOD; PIEZOELECTRIC ACTUATORS;

MICROSCOPES;

EID: 0034204828     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.3747     Document Type: Article

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