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Volumn 14, Issue 2, 2001, Pages 147-152
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Realization and thermal characterization of thin-film optothermal microsensor
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Author keywords
[No Author keywords available]
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Indexed keywords
GOLD;
HEAT CONDUCTION;
INTEGRATED CIRCUIT LAYOUT;
LASER BEAMS;
PALLADIUM;
PERMITTIVITY;
THERMOCOUPLES;
THERMOELECTRICITY;
THIN FILM DEVICES;
OPTOTHERMAL SENSOR ARRAYS;
POWER LASERS;
THIN-FILM THERMOELECTRIC LINEAR ARRAYS;
MICROSENSORS;
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EID: 0035334864
PISSN: 12860042
EISSN: None
Source Type: Journal
DOI: 10.1051/epjap:2001151 Document Type: Article |
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Times cited : (6)
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References (16)
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