Micromachined capacitive transducer arrays for intravascular ultrasound imaging

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 315-318

  Guldiken, Rasim O ^a   Levent Degertekin, F ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT); INTRAVASCULAR ULTRASONIC IMAGING; LOW STRESS PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; MICROMACHINED CAPACITIVE TRANSDUCER ARRAYS;

CAPACITANCE; CMOS INTEGRATED CIRCUITS; IMAGE RECONSTRUCTION; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON NITRIDE; STRESS ANALYSIS; ULTRASONIC IMAGING; VOLUME MEASUREMENT;

ULTRASONIC TRANSDUCERS;

EID: 26844485847     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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