A nanoimprinted strain-induced reconfigurable polymer micro-optical grating

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 243-246

  Tung, Yi Chung ^a   Kurabayashi, Katsuo ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOIMPRINTING; POLYDIMETHYLSILOXANE (PDMS); PROGRAMMED MECHANICAL STRAIN; RECONFIGURABILITY;

DIFFRACTION GRATINGS; ELASTOMERS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; MICROSTRUCTURE; NANOTECHNOLOGY; PHOTOLITHOGRAPHY; STRAIN; VISIBILITY;

MICROOPTICS;

EID: 26844481177     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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