Diffraction grating scanner using a micromachined resonator

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 45-48

  Zhou, Guangya ^a   Logeeswaran, V J ^a   Tay, Francis E H ^a   Chau, Fook Siong ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMIRRORS; OPTICAL ANGLES; SCANNERS; SCANNING ANGLES;

DIFFRACTION GRATINGS; ELECTRIC POTENTIAL; ELECTROSTATICS; LASER BEAMS; MICROMACHINING; MIRRORS; OPTICAL RESONATORS; VIBRATIONS (MECHANICAL);

SCANNING;

EID: 3042743978     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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