Piezoelectric bimorph transducers based on single crystal Al 0.3Ga0.7As films

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 379-382

  Li, L ^a   Kumar, P ^a   Calhoun, L ^b   DeVoe, D L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; DAMPING; DOPING (ADDITIVES); ELECTRODES; LASER DOPPLER VELOCIMETERS; MICROACTUATORS; NATURAL FREQUENCIES; SILICON; SINGLE CRYSTALS; VIBRATIONS (MECHANICAL);

BIMORPH PIEZOELECTRIC MICROACTUATORS; LASER DOPPLER VIBROMETRY (LDV); PIEZOELECTRIC BIMORPH TRANSDUCERS; PIEZOELECTRIC FILMS; QUALITY FACTORS;

PIEZOELECTRIC TRANSDUCERS;

EID: 26844470541     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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