A pneumatic air table realized by micro-EDM

Journal of Microelectromechanical Systems

Volumn 7, Issue 4, 1998, Pages 380-385

  Guenat, Olivier T ^a,c,d,e   Hirata, Toru ^b,f,g,h   Akashi, Tomoyuki ^b,g,i   Grétillat, Marc Alexis ^a   De Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

^c Engineering School of Bienne   (Switzerland)

^d UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^e MOLECULAR DEVICES CORPORATION   (United States)

^f UNIVERSITY OF TOKYO   (Japan)

^g TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^h Sumitomo Heavy Industries ^*  (Japan)

ⁱ Sumitomo Heavy Industries   (Japan)

Author keywords

Conveyor; Microelectrodischarge machining; Microfactory; Microtransportation; Pneumatic air table

Indexed keywords

FRICTION; MICROMACHINING;

MICROELECTRODISCHARGE MACHINING; MICROTRANSPORTATION DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 0032304176     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.735345     Document Type: Article

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