Integrated fabrication of electrostatic microactuator for HDD R/W head positioning

Microsystem Technologies

Volumn 11, Issue 8-10, 2005, Pages 612-615

  Chen, J ^a   Lu, Y ^a   Yang, J P ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESIVES; ALUMINA; BONDING; CARBIDES; CONTROL SYSTEM ANALYSIS; HARD DISK STORAGE; PHOTORESISTS; SERVOMECHANISMS; SILICON WAFERS;

ALUMINA-TITANIUM CARBIDE (ALTIC) SLIDERS; READ/WRITE (R/W) HEAD POSITIONING; VOICE COIL MOTORS; WAFER BONDING;

ELECTROSTATIC ACTUATORS;

EID: 26444501383     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0531-7     Document Type: Conference Paper

References (12)

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