Spectral density-based statistical measures for image sharpness

Metrologia

Volumn 42, Issue 5, 2005, Pages 351-359

  Zhang, Nien Fan ^a   Vladar, Andras E ^a   Postek, Michael T ^a   Larrabee, Robert D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL APPLICATIONS; SCANNING ELECTRON MICROSCOPY; STATISTICAL METHODS;

BIVARIATE KURTOSIS; IMAGE SHARPNESS; ON-LINE SEMICONDUCTOR PRODUCTION; PERIODIC PERFORMANCE TESTING;

IMAGE ANALYSIS;

EID: 26444450983     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/42/5/003     Document Type: Article

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