Influences of post-deposition annealing on the properties of the ZrO 2 thin films prepared by electron beam evaporation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5774, Issue , 2005, Pages 307-311

  Shao, S Y ^a   Shao, J D ^a   Zhang, D P ^a   Huang, J B ^a   Fan, Z X ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Annealing; Optical property; Stress; Surface morphology; Thin films; Zirconium oxide

Indexed keywords

ANNEALING; DENSIFICATION; GLASS; MECHANICAL PROPERTIES; MICROSTRUCTURE; OPTICAL PROPERTIES; SUBSTRATES; ZIRCONIA; ZIRCONIUM COMPOUNDS;

ANNEALING TEMPERATURE; MICROSTRUCTURE DENSIFICATION;

THIN FILMS;

EID: 25644457686     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.607336     Document Type: Conference Paper

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