Deposition and structural characterization of ZrO2 and yttria-stabilized ZrO2 films by chemical vapor deposition

Thin Solid Films

Volumn 254, Issue 1-2, 1995, Pages 33-38

  Kim, J S ^a   Marzouk, H A ^a   Reucroft, P J ^a  

^a UNIVERSITY OF KENTUCKY   (United States)

Author keywords

Chemical vapour deposition; Oxides; X ray diffraction; X ray photoelectron spectroscopy

Indexed keywords

CHARACTERIZATION; DECOMPOSITION; IMPURITIES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OXIDES; OXYGEN; STRUCTURE (COMPOSITION); VAPORS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; YTTRIUM;

PHASE STRUCTURE; YTTRIA STABILIZED ZIRCONIUM COMPOUNDS; YTTRIUM DIPIVALOYLMETHANE; ZIRCONIUM ACETYLACETONATE;

DIELECTRIC FILMS;

EID: 0029234077     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(94)06274-O     Document Type: Article

References (20)

1. Stabilization of Zirconia with Calcia and Magnesia
2. Cubic Phase Stabilization of Translucent Yttria-Zirconia at Very Low Temperatures
3. Phase Separation in 12 mol% Ceria-Doped Zirconia Induced by Heat Treatment in H2 and Ar
4. Nature and Thermal Evolution of Amorphous Hvdrated Zirconium Oxide
5. Polymorphic Behavior of Thin Evaporated Films of Zirconium and Hafnium Oxides
6. Proc. Ann. MAS Meeting
7. Zirconia and Zirconia Ceramics