Leveling of thin film surface by low-incident-angle ion milling for HTS SFQ circuits

Physica C: Superconductivity and its Applications

Volumn 426-431, Issue II, 2005, Pages 1514-1518

  Nakayama, K ^a   Ishimaru, Y ^a   Wakana, H ^a   Adachi, S ^a   Hato, T ^a   Maruyama, M ^a   Suzuki, H ^a   Tarutani, Y ^a   Tanabe, K ^a  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

Author keywords

Etching, Surface roughness; HTS; Leveling; Multilayer; SFQ; Smooth; SSO

Indexed keywords

ELECTRIC POTENTIAL; MULTILAYERS; REACTIVE ION ETCHING; SUPERCONDUCTING FILMS; SURFACE TREATMENT; YTTRIUM BARIUM COPPER OXIDES;

ETCHING, SURFACE ROUGHNESS; LEVELING; SFQ; SMOOTH; SSO;

HIGH TEMPERATURE SUPERCONDUCTORS;

EID: 25644443143     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physc.2005.02.119     Document Type: Article

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