Properties of ZrN films as substrate masks in liquid phase epitaxial lateral overgrowth of compound semiconductors

Crystal Research and Technology

Volumn 40, Issue 4-5, 2005, Pages 492-497

  Dobosz, D ^a   Golaszewska, K ^b   Zytkiewicz, Z R ^a   Kaminska, E ^b   Piotrowska, A ^b   Piotrowski, T T ^b   Barcz, A ^a,b   Jakiela, R ^a  

^a INSTITUTE OF PHYSICS   (Poland)

^b ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

Epitaxial lateral overgrowth; Liquid phase epitaxy; Selective epitaxy

Indexed keywords

DEGRADATION; ELECTRIC CONDUCTIVITY; HEAT TREATMENT; LIQUID PHASE EPITAXY; SEMICONDUCTING GALLIUM ARSENIDE; ZIRCONIUM COMPOUNDS;

ELECTRICAL CONTACTS; EPITAXIAL LATERAL OVERGROWTH; SELECTIVE EPITAXY; ZRN FILMS;

THIN FILMS;

EID: 25444526651     PISSN: 02321300     EISSN: None     Source Type: Journal    
DOI: 10.1002/crat.200410373     Document Type: Conference Paper

References (17)

1. T. Nishinaga, J. Cryst. Growth 237-239, 1410 (2002).
2. Z. R. Zytkiewicz, Cryst. Res. Technol. 34, 573 (1999).
3. S. Sakai, Y. Ohashi, and Y. Shintani, J. Appl. Phys. 70, 4899 (1991).
4. M. G. Mauk and J. P. Curran, J. Cryst. Growth 225, 348 (2001).
5. D. Dobosz, Z. R. Zytkiewicz, T. T. Piotrowski, E. Kaminska, E. Papis, and A. Piotrowska, Cryst. Res. Technol. 38, 297 (2003).
6. Y. C. Liu, Z. R. Zytkiewicz, and S. Dost, J. Cryst. Growth 265, 341 (2004).
7. L. E. Toth, Transition Metals Carbides and Nitrides, Academic, New York 1971.
8. P. Karvankova, H.-D. Mannling, C. Eggs, and S. Veprek, Surf. Coating Technol. 146-147, 280 (2001).
9. M. Ostling, S. Nygren, and C. S. Petersson, Thin Solid Films 145, 81 (1986).
10. L. Krusin-Elbaum, S. Brodsky, and K. Ahn, Mat. Res. Soc. Symp. Proc. 71, 351 (1988).
11. A. Scorzoni and M. Finetti, Mater. Sci. Reports 3, 79 (1988).
12. S. Niymsoan, W. Grant, D. L. Olson, and B. Mishra, Thin Solid Films 415, 187 (2002).
13. L. Krusin-Elbaum, and M. Wittmer, Thin Solid Films 107, 111 (1983).
14. H. N. Al-Shareef, X. Chen, D. J. Lichtwalner, and A. I. Kingon, Thin Solid Films 280, 265 (1996).
15. K. Salmenoja, A. S. Karhonen, E. Erola, and J. M. Molarius, Appl. Phys. Lett. 49, 505 (1986).
16. W. M. Mueller, J. P. Blackledge, and G. G. Libowitz, in: Metal Hydrides (Academic Press, New York, 1968).
17. E. Kaminska, A. Piotrowska, E. Mizera, M. Guziewicz, A. Barcz, E. Dynowska, and S. Kwiatkowski, Mat. Res. Soc. Symp. Proc. 337, 349 (1994).